Imagine being able to deposit a film of material just a few atomic layers at a time ... These precursors react on the wafer surface, forming the desired film along with byproducts that are removed ...

SPM techniques share the common approach of scanning a probe over a specimen's surface to gather information. While STM provides unparalleled atomic-resolution images of conductive and semiconductive ...

LEIS, using low-energy ions, offers extreme surface sensitivity for studying the outermost atomic layer, including adsorbates and thin film composition. ICISS, analyzing multiple collisions, reveals ...