Interestingly, DUV lithography at a wavelength of 193 nm has ... this involves the use of two exposures and two laterally displaced mask images to increase the resolution beyond that obtainable ...

One of the deep ultraviolet (DUV) lithography machines operates at a wavelength of 193 nanometres (nm), with a resolution ...

The list of electronic special equipment includes deep ultraviolet (DUV) lithography equipment called "argon fluoride lithography machine," with core technical specifications of "300mm wafer ...