LONDON — Japan's Nikon Corp. has introduced an i-line stepper, the NSR-SF140 intended to provide high throughput and low cost of ownership for relatively low-resolution lithography at 280-nanometers ...

No. 2 litho tool supplier Nikon Corp. today unveiled the latest in its NSR-SF series of i-line tools, the NSR-SF130 scan-field stepper. The system makes use of advanced lens technology to achieve the ...

--(BUSINESS WIRE)--Nikon continues its focus on high productivity lithography solutions with the introduction of the NSR-SF150, a scan field i-line stepper ... scan field (SF) steppers – with ...