PMMA is transparent, with a refractive index of 1.49, and easily formed into optical components. It is also used as a photoresist material in the fabrication of semiconducting devices. PMMA has a ...

The key steps in EBL for CFL mold fabrication include: Coating the substrate (e.g., silicon or quartz) with an electron-sensitive resist, such as PMMA or HSQ. Exposing the resist to a focused electron ...