Carbon nanotubes present a game-changing solution for preventing defects in EUV lithography, supporting the semiconductor industry's drive toward extreme miniaturization and improved chip ...

According to lithography expert Dr. Christopher Mack, Intel has presented data at the industry SPIE conference showing that if your die size is small enough, manufacturing without a pellicle can ...

Extreme ultraviolet lithography extends photolithography to much shorter wavelengths and is a cost-effective method of producing more-advanced integrated circuits. Although some infrastructure ...

“No pellicle solution today meets all the requirements for 157nm lithography,” said Gerhard Gross, director of lithography at Sematech, based in Austin. “There are risks associated with making a ...

“If you are shining the light through the mask like 193nm immersion lithography, it only goes through the pellicle once,” D2S’ Fujimura said. “EUV light needs to go through the pellicle twice for EUV ...

AUSTIN, Tex. — Solving one of the many problems in 157-nm lithography, International Sematech determined that hard pellicle technology is feasible if or when these tools move into production fabs. A ...

EUV mask/pellicle challenges Like optical lithography, EUV also requires a photomask. Unlike optical masks, which are transmissive, EUV masks are reflective. EUV masks are different in other ways. An ...

imec, a Belgium-based research and innovation hub in nanoelectronics and digital technologies, and Mitsui Chemicals, a Japan-based chemical company and EUV pellicle supplier, have announced a ...

TSMC has announced that it's taped out its first 7nm EUV design, with 5nm risk production planned for Q2 2019. Previous 7nm chips were and are built using conventional lithography.

IMEC and International SEMATECH Form Cooperative Program to Accelerate 157nm Lithography Development. March 13, 2003 01:02 PM Eastern Standard Time. ... uniform reticle and pellicle printability, ...

imec, a Belgium-based research and innovation hub in nanoelectronics and digital technologies, and Mitsui Chemicals, a Japan-based chemical company and EUV pellicle supplier, have announced a ...