The selected specification is Unified Modeling Language (UML) state machine diagram. UML state machine diagram describes a system in term of state which can be changed when there is an action ...

That’s what chipmakers do when they etch complex patterns on silicon to make the semiconductors that power most of the gadgets and technology around us. As we demand more power and speed from ...

For example, in batch-type wet etching devices, the flow of chemical liquids in the process bath can vary depending on the device structure, which causes variations in the etching state of the wafer.